Please use this identifier to cite or link to this item: http://hdl.handle.net/10261/21810
Share/Export:
logo share SHARE logo core CORE BASE
Visualizar otros formatos: MARC | Dublin Core | RDF | ORE | MODS | METS | DIDL | DATACITE
Title

Fabrication of high quality factor photonic crystal microcavities in InAsP/InP membranes combining reactive ion beam etching and reactive ion etching

AuthorsMartínez Rodríguez, Luis Javier CSIC; Prieto-González, Iván CSIC ORCID; Alén, Benito CSIC ORCID; Postigo, Pablo Aitor CSIC ORCID
KeywordsElectron beam lithography
III-V semiconductors
Indium compounds
Membranes
Microcavities
Optical fabrication
Issue Date23-Jun-2009
PublisherAmerican Vacuum Society
CitationJournal of Vacuum Science and Technology - Section B 27(4): 1801-1804 (2009)
AbstractThe process of fabrication of high quality factor photonic crystal microcavities in slabs of InP with light emission at 1.5 µm is reported. The process includes e-beam lithography, reactive ion beam etching with a CHF3/N2 gas mixture, and reactive ion etching with a CH4/H2 gas mixture and O2 cycling. An InGaAs sacrificial layer is removed by chemical wet etching in order to obtain the photonic crystal membrane. Microphotoluminescense measurements have been performed to assess the quality of the fabricated structures. Quality factors up to (next) 30 000 and laser emission with thresholds of excitation pump power around 34 µW have been obtained.
Description4 pages.-- PACS: 42.70.Qs; 81.65.Cf; 85.40.Hp; 78.55.Cr; 81.16.Nd; 78.67.De
Publisher version (URL)http://dx.doi.org/10.1116/1.3151832
URIhttp://hdl.handle.net/10261/21810
DOI10.1116/1.3151832
ISSN1071-1023
Appears in Collections:(IMN-CNM) Artículos

Show full item record
Review this work

SCOPUSTM   
Citations

18
checked on May 10, 2022

WEB OF SCIENCETM
Citations

16
checked on May 14, 2022

Page view(s)

353
checked on May 16, 2022

Google ScholarTM

Check

Altmetric

Dimensions


WARNING: Items in Digital.CSIC are protected by copyright, with all rights reserved, unless otherwise indicated.