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Título

Effect of deposition temperature on surface acoustic wave velocity of aluminum nitride films determined by Brillouin spectroscopy

AutorAssouar, M. B.; Jiménez Riobóo, R. J. ; Vila, M.; Alnot, P.
Palabras claveAluminium compounds
III-V semiconductors
Wide band gap semiconductors
Brillouin spectra
Surface acoustic waves
Fecha de publicación3-nov-2005
EditorAmerican Institute of Physics
CitaciónJournal of Applied Physics 98(9): 096102 (2005)
ResumenBrillouin spectroscopy has been used to study the effect of the deposition temperature on the surface acoustic wave (SAW) propagation velocity of aluminum nitride (AlN) films. The results show a dependence of the SAW propagation velocity on the growth temperature of AlN films. The highest value of acoustic velocity was obtained for the film elaborated without heating. Structural characterization of the AlN films synthesized at various deposition temperatures was carried out by x-ray diffraction. These analyses pointed out that the deposition temperature influences the standard deviation of (002) AlN film preferred orientation. The growth temperature clearly influences the acoustical and crystalline properties of AlN thin films.
Descripción3 pages, 4 figures.-- PACS: 78.35.+c; 68.35.Iv; 78.66.Fd
Versión del editorhttp://dx.doi.org/10.1063/1.2121927
URIhttp://hdl.handle.net/10261/21736
DOI10.1063/1.2121927
ISSN0021-8979
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