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Title

Bonding and hardness in nonhydrogenated carbon films with moderate sp3 content

AuthorsGago, Raúl CSIC ORCID; Jiménez Guerrero, Ignacio CSIC ORCID; Albella, J. M. CSIC; Climent-Font, A.; Cáceres, D.; Vergara, I.
KeywordsCarbon
Thin films
Hardness
Amorphous state
Issue Date1-Jun-2000
PublisherAmerican Institute of Physics
CitationJournal of Applied Physics 87(11): 8174 (2000)
AbstractAmorphous carbon films with an sp3 content up to 25% and a negligible amount of hydrogen have been grown by evaporation of graphite with concurrent Ar + ion bombardment. The sp3 content is maximized for Ar + energies between 200 and 300 eV following a subplantation mechanism. Higher ion energies deteriorate the film due to sputtering and heating processes. The hardness of the films increases in the optimal assisting range from 8 to 18 GPa, and is explained by crosslinking of graphitic planes through sp3 connecting sites.
Description7 pages, 10 figures, 1 table.-- PACS: 68.60.Bs; 81.40.Pq; 68.35.Gy; 81.40.Np; 61.50.Lt
Publisher version (URL)http://dx.doi.org/10.1063/1.373514
URIhttp://hdl.handle.net/10261/21654
DOI10.1063/1.373514
ISSN0021-8979
Appears in Collections:(ICMM) Artículos

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