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Título

X-ray absorption spectroscopy and atomic force microscopy study of bias-enhanced nucleation of diamond films

AutorGarcía Hernández, M. ; Jiménez Guerrero, Ignacio ; Vázquez, Luis ; Gómez-Aleixandre, C. ; Albella, J. M. ; Sánchez, Olga ; Terminello, Louis J.; Himpsel, F. J.
Palabras claveDiamonds
X-ray spectroscopy
Absorption spectroscopy
Nucleation
Thin films
Grain size
Fecha de publicación27-abr-1998
EditorAmerican Institute of Physics
CitaciónApplied Physics Letters 72(17): 2105 (1998)
ResumenThe bias-enhanced nucleation of diamond on Si(100) has been studied by x-ray absorption near-edge spectroscopy (XANES) and atomic force microscopy, two techniques well suited to characterize nanometric crystallites. Diamond nuclei of ~ 15 nm are formed after 5 min of bias-enhanced treatment. The number of nuclei and its size increases with the time of application of the bias voltage. A nanocrystalline diamond film is attained after 20 min of bias-enhanced nucleation. At the initial nucleation stages, the Si substrate appears covered with diamond crystallites and graphite, without SiC being detected by XANES.
Descripción3 pages, 3 figures,1 table.-- PACS: 81.05.Tp; 68.55.Jk; 81.15.Gh; 78.70.Dm; 61.46.+w
Versión del editorhttp://dx.doi.org/10.1063/1.121290
URIhttp://hdl.handle.net/10261/21547
DOI10.1063/1.121290
ISSN0003-6951
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