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Título

Detection of nanomechanical vibrations by dynamic force microscopy in higher cantilever eigenmodes

AutorSan Paulo, Alvaro; Black, Justin P.; White, Richard M.; Bokor, Jeffrey
Fecha de publicación2-ago-2007
EditorAmerican Institute of Physics
CitaciónApplied Physics Letters 91(5): 053116 (2007)
ResumenThe authors present a method based on dynamic force microscopy to characterize subnanometer-scale mechanical vibrations in resonant micro- and nanoelectromechanical systems. The method simultaneously employs the first eigenmode of the microscope cantilever for topography imaging and the second eigenmode for the detection of the resonator vibration. Here, they apply this scheme for the characterization of a 1.6 GHz film bulk acoustic resonator, showing that it overcomes the main limitations of acoustic imaging in contact-mode atomic force microscopy. The method provides nanometer-scale lateral resolution on arbitrarily high resonant frequency systems, which makes it applicable to a wide diversity of electromechanical systems.
Descripción3 pages, 4 figures.
Versión del editorhttp://dx.doi.org/10.1063/1.2767764
URIhttp://hdl.handle.net/10261/21331
DOI10.1063/1.2767764
ISSN0003-6951
Aparece en las colecciones: (IMB-CNM) Artículos
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