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Title

Ordered vapor-solid ZnO structures grown on femtosecond laser induced periodic structures on silicon

AuthorsSotillo, Belén; Siegel, Jan ; Solís Céspedes, Javier ; Fernández, P.
Issue Date1-Sep-2019
CitationEuropean Congress and Exhibition on advanced materials and processes (2019)
AbstractIntroduction/Purpose Vapor-solid deposition has been previously used to obtain ZnO micro- and nanostructures, using both the same material as substrate [1], as well as other substrates like silicon [2]. Organization of the structures on the substrates is desirable for their use in different applications (gas sensing, field emission¿). To this end, it has been proposed for example the use of a catalyzer [3], achieving ordered structures. A different approach is to produce surface structuring of the substrates that could be used for the subsequent growth of self-arranged structures. The irradiation of the material surface with femtosecond laser pulses can generate (under certain conditions) self-organized, periodic structures (laser induced periodic surface structures, LIPSS). Methods Silicon <100> has been selected as substrate to produce different laser-induced structures. The femtosecond laser used to perform the experiments is a Yb-doped fiber laser operating at a central wavelength of 1030 nm with a pulse duration of 340 fs. Vapor-solid growth has been performed in a horizontal tubular furnace, at a temperature of 900ºC under an Argon flux, using ZnS powders as precursor. Results Different self-organized patterns have been obtained on Si <100>, depending on the irradiation conditions [4]: amorphous LIPSS; ablative LIPSS and pseudo-spikes. All of them have been used as substrates to grow ordered ZnO structures by a vapor-solid method. Micro-Raman characterization have been applied on the processed silicon substrates and on the ZnO grown structures to identify the characteristics that induce the preferential deposition of the ZnO material. Additionally, cathodoluminescence measurements allow the study of the luminescent defects generated in ZnO grown on the different Si substrates [5]. Conclusions The best results are obtained with the amorphous LIPSS substrates (Figure 1), where a clear preferential grown has been observed on the irradiated substrate. Selected references [1] Piqueras, J., Maestre, D., Ortega, Y., Cremades, A., & Fernández, P. (2008). Cathodoluminescence study of semiconductor oxide micro¿and nanostructures grown by vapor deposition. Scanning: The Journal of Scanning Microscopies, 30(4), 354-357. [2] Umar, A., Kim, S. H., Kim, J. H., Al-Hajry, A., & Hahn, Y. B. (2008). Temperature-dependant non-catalytic growth of ultraviolet-emitting ZnO nanostructures on silicon substrate by thermal evaporation process. Journal of Alloys and Compounds, 463(1-2), 516-521. [3] Wang, X., Summers, C. J., & Wang, Z. L. (2004). Large-scale hexagonal-patterned growth of aligned ZnO nanorods for nano-optoelectronics and nanosensor arrays. Nano letters, 4(3), 423-426. [4] Puerto, D., Garcia-Lechuga, M., Hernandez-Rueda, J., Garcia-Leis, A., Sanchez-Cortes, S., Solis, J., & Siegel, J. (2016). Femtosecond laser-controlled self-assembly of amorphous-crystalline nanogratings in silicon. Nanotechnology, 27(26), 265602. [5] de Prado, E., Florian, C., Sotillo, B., Siegel, J., Solis, J., & Fernández, P. (2018). Optical spectroscopy study of nano-and microstructures fabricated by femtosecond laser pulses on ZnO based systems. CrystEngComm, 20(21), 2952-2960.
DescriptionEUROMAT 2019, Stockholm, 1-5 September 2019. -- https://euromat2019.fems.eu/
URIhttp://hdl.handle.net/10261/211732
Appears in Collections:(CFMAC-IO) Comunicaciones congresos
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