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Structure formation on the surface of indium phosphide irradiated by femtosecond laser pulses

AutorBonse, J.; Munz, M.; Sturm, H.
Fecha de publicación16-dic-2004
EditorAmerican Institute of Physics
CitaciónJournal of Applied Physics 97(1): 013538 (2005)
ResumenLaser-induced periodic surface structures (LIPSS; ripples) with different spatial characteristics have been observed after irradiation of single-crystalline indium phosphide (c-InP) with multiple linearly polarized femtosecond pulses (130 fs, 800 nm) in air. With an increasing number of pulses per spot, N, up to 100, a characteristic evolution of two different types of ripples has been observed, i.e., (i) the growth of a grating perpendicular to the polarization vector consisting of nearly wavelength-sized periodic lines and (ii), in a specific pulse number regime (N = 5–30), the additional formation of equally oriented ripples with a spatial period close to half of the laser wavelength. For pulse numbers higher than 50, the formation of micrometer-spaced grooves has been found, which are oriented perpendicular to the ripples. These topographical surface alterations are discussed in the frame of existing LIPSS theories.
Descripción9 pages, 9 figures.
Versión del editorhttp://dx.doi.org/10.1063/1.1827919
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