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Por favor, use este identificador para citar o enlazar a este item: http://hdl.handle.net/10261/21047
Título

Monolithic mass sensor fabricated using a conventional technology with attogram resolution in air conditions

AutorVerd Martorell, Jaume; Uranga del Monte, Arantxa; Abadal Berini, Gabriel; Teva, J.; Torres, F.; Perez Murano, Francesc X. ; Fraxedas, J.
Fecha de publicación2-jul-2007
EditorAmerican Institute of Physics
CitaciónApplied Physics Letters 91(1): 013501 (2007)
ResumenMonolithic mass sensors for ultrasensitive mass detection in air conditions have been fabricated using a conventional 0.35 µm complementary metal-oxide-semiconductor (CMOS) process. The mass sensors are based on electrostatically excited submicrometer scale cantilevers integrated with CMOS electronics. The devices have been calibrated obtaining an experimental sensitivity of 6×10−11 g/cm2 Hz equivalent to 0.9 ag/Hz for locally deposited mass. Results from time-resolved mass measurements are also presented. An evaluation of the mass resolution have been performed obtaining a value of 2.4×10−17 g in air conditions, resulting in an improvement of these devices from previous works in terms of sensitivity, resolution, and fabrication process complexity.
Descripción3 pages, 4 figures, 1 table.
Versión del editorhttp://dx.doi.org/10.1063/1.2753120
URIhttp://hdl.handle.net/10261/21047
DOI10.1063/1.2753120
ISSN0003-6951
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