Advanced Strategies in Thin Films Engineering by Magnetron Sputtering

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Title:	Advanced Strategies in Thin Films Engineering by Magnetron Sputtering
Authors:	Palmero, Alberto ; Martin, N.
Keywords:	Magnetron sputtering Nanostructures Growth mechanism Functional properties HiPIMS Oblique angle deposition
Issue Date:	23-Apr-2020
Publisher:	Multidisciplinary Digital Publishing Institute
Citation:	Coatings 10(4): 419 (2020)
Abstract:	This Special Issue contains a series of reviews and papers representing some recent results and some exciting perspectives focused on advanced strategies in thin films growth, thin films engineering by magnetron sputtering and related techniques. Innovative fundamental and applied research studies are then reported, emphasizing correlations between structuration process parameters, new ideas and approaches for thin films engineering and resulting properties of as-deposited coatings.
Description:	© 2020 by the authors.
Publisher version (URL):	https://doi.org/10.3390/coatings10040419
URI:	http://hdl.handle.net/10261/209447
DOI:	10.3390/coatings10040419
ISSN:	2079-6412
E-ISSN:	2079-6412
Appears in Collections:	(ICMS) Artículos

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