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Title

Mass sensing for the advanced fabrication of nanomechanical resonators

AuthorsGruber, G.; Urgell, C.; Tavernarakis, A.; Stavrinadis, Alexandros; Tepsic, S.; Magen, Cesar; Sangiao, S.; Teresa, José María de ; Verlot, P.; Bachtold, A.
KeywordsMechanical resonators
NEMS
Nanofabrication
Mass sensing
Carbon nanotube
Electron microscopy
Issue Date2019
PublisherAmerican Chemical Society
CitationNano Letters 19(10): 6987-6992 (2019)
AbstractWe report on a nanomechanical engineering method to monitor matter growth in real time via e-beam electromechanical coupling. This method relies on the exceptional mass sensing capabilities of nanomechanical resonators. Focused electron beam-induced deposition (FEBID) is employed to selectively grow platinum particles at the free end of singly clamped nanotube cantilevers. The electron beam has two functions: it allows both to grow material on the nanotube and to track in real time the deposited mass by probing the noise-driven mechanical resonance of the nanotube. On the one hand, this detection method is highly effective as it can resolve mass deposition with a resolution in the zeptogram range; on the other hand, this method is simple to use and readily available to a wide range of potential users because it can be operated in existing commercial FEBID systems without making any modification. The presented method allows one to engineer hybrid nanomechanical resonators with precisely tailored functionalities. It also appears as a new tool for studying the growth dynamics of ultrathin nanostructures, opening new opportunities for investigating so far out-of-reach physics of FEBID and related methods.
Publisher version (URL)https://doi.org/10.1021/acs.nanolett.9b02351
URIhttp://hdl.handle.net/10261/208005
DOI10.1021/acs.nanolett.9b02351
ISSN1530-6984
E-ISSN1530-6992
Appears in Collections:(ICMA) Artículos
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