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Optical Transduction for Vertical Nanowire Resonators

AuthorsMolina, Juan; Ramos Vega, Daniel ; Gil-Santos, Eduardo ; Escobar, Javier Enrique; Ruz Martínez, José Jaime ; Tamayo de Miguel, Francisco Javier ; San Paulo, Álvaro ; Calleja, Montserrat
KeywordsSemiconductor Nanowires
Silicon Nanowires
Nanomechanical Resonators
Nanomechanical Sensors
Nanoelectromechanical Systems (NEMS)
Issue Date19-Mar-2020
PublisherAmerican Chemical Society
CitationNano Letters 20(4): 2359-2369 (2020)
AbstractWe describe an optical transduction mechanism to measure the flexural mode vibrations of vertically aligned nanowires on a flat substrate with high sensitivity, linearity, and ease of implementation. We demonstrate that the light reflected from the substrate when a laser beam strikes it parallel to the nanowires is modulated proportionally to their vibration, so that measuring such modulation provides a highly efficient resonance readout. This mechanism is applicable to single nanowires or arrays without specific requirements regarding their geometry or array pattern, and no fabrication process besides the nanowire generation is required. We show how to optimize the performance of this mechanism by characterizing the split flexural modes of vertical silicon nanowires in their full dynamic range and up to the fifth mode order. The presented transduction approach is relevant for any application of nanowire resonators, particularly for integrating nanomechanical sensing in functional substrates based on vertical nanowires for biological applications.
Publisher version (URL)https://doi.org/10.1021/acs.nanolett.9b04909
Appears in Collections:(IMN-CNM) Artículos
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