English   español  
Please use this identifier to cite or link to this item: http://hdl.handle.net/10261/181260
Share/Impact:
Statistics
logo share SHARE logo core CORE   Add this article to your Mendeley library MendeleyBASE

Visualizar otros formatos: MARC | Dublin Core | RDF | ORE | MODS | METS | DIDL
Exportar a otros formatos:

Title

Development of sub-micron broadband lens-coupled LEKIDs for Sub-mm astronomy

AuthorsGómez Gutiérrez, Alicia; Prieto, P.; Bueno-López, Juan ; Doyle, S.; Barry, P.; Bideaud, A.; Llombart, N.; Granados, Daniel ; Costa Krämer, José Luis ; Martín-Pintado, Jesús ; Baselmans, J. J. A.
KeywordsLumped element
Kinetic inductance detector
Nanofabrication
Issue DateJul-2016
PublisherSpringer
CitationJournal of Low Temperature Physics 184(1-2): 148-153 (2016)
AbstractWe present a fabrication method for sub-micron lens-coupled lumped element kinetic inductance detectors (LEKIDs) for broadband sub-millimeter (sub-mm) and THz radiation detection. The LEKIDs are fabricated from very thin (12 nm) and narrow (200 nm) aluminum lines to match the impedance of the LEKID to the substrate impedance. The fabrication process is based on a combination of maskless laserwriter lithography and electron beam lithography, providing low (few microns) and high resolution (down to 200 nm) over large areas in a single process. Preliminary optical characterization shows that the fabricated LEKIDs are sensitive to 1.5 THz radiation.
Publisher version (URL)https://doi.org/10.1007/s10909-016-1517-9
URIhttp://hdl.handle.net/10261/181260
DOI10.1007/s10909-016-1517-9
ISSN0022-2291
E-ISSN1573-7357
Appears in Collections:(IMN-CNM) Artículos
(CAB) Artículos
Files in This Item:
File Description SizeFormat 
accesoRestringido.pdf15,38 kBAdobe PDFThumbnail
View/Open
Show full item record
Review this work
 


WARNING: Items in Digital.CSIC are protected by copyright, with all rights reserved, unless otherwise indicated.