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Title

Advanced scanning probe lithography

AuthorsGarcía García, Ricardo ; Knoll, Armin W.; Riedo, Elisa
Issue Date5-Aug-2014
PublisherSpringer Nature
CitationNature Nanotechnology 9: 577-587 (2014)
AbstractThe nanoscale control afforded by scanning probe microscopes has prompted the development of a wide variety of scanning-probe-based patterning methods. Some of these methods have demonstrated a high degree of robustness and patterning capabilities that are unmatched by other lithographic techniques. However, the limited throughput of scanning probe lithography has prevented its exploitation in technological applications. Here, we review the fundamentals of scanning probe lithography and its use in materials science and nanotechnology. We focus on robust methods, such as those based on thermal effects, chemical reactions and voltage-induced processes, that demonstrate a potential for applications.
Publisher version (URL)https://doi.org/10.1038/nnano.2014.157
URIhttp://hdl.handle.net/10261/180952
DOI10.1038/nnano.2014.157
ISSN1748-3387
E-ISSN1748-3395
Appears in Collections:(ICMM) Artículos
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