A novel design methodology for the mixed-domain optimization of a MEMS accelerometer

Abstract

This paper proposes a novel optimization-based design methodology that can be used for mixed-domain synthesis of MEMS accelerometers. Several problems have been identified with existing methodologies and comparative experiments that demonstrate the superiority of the proposed approach are performed. Highly accurate analytical models of the MEMS accelerometer have been used for the evaluation of the MEMS sensor performances in the mixed-domain optimization. The circuit level simulations, on the other hand, are based on an electrical simulator, e.g., Hspice. The implemented methodology has been tested on the optimization of a MEMS accelerometer that includes a capacitive MEMS sensor and an analog read-out circuitry.