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In-situ monitoring of the Atomic Force Microscopy (AFM) tip by analysing the cantilever’s higher harmonic vibrations

AuthorsRull, Enrique; Staufer, Urs
Issue Date2015
CitationMNC 2015
AbstractAutomated in-line Metrology for Nanoscale Production: Aim4np Project. New metrological processes in industry; a challenge in industry.
DescriptionTrabajo presentado a la International MicroNano Conference, celebrada en Amsterdam (Netherlands) del 8 al 9 de diciembre de 2015.
Appears in Collections:(CIN2) Comunicaciones congresos
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