Please use this identifier to cite or link to this item: http://hdl.handle.net/10261/16044
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Title

Composition and morphology of metal-containing diamond-like carbon films obtained by reactive magnetron sputtering

AuthorsCorbella, Carles; Pascual, E.; Oncins, G.; Canal, Cristina; Andújar, J. L.; Bertrán, Enric
KeywordsDiamond-like carbon
Metals
Structure
Surface properties
Issue Date6-Jan-2005
PublisherElsevier
CitationThin Solid Films 482(1-2): 293-298 (2005)
AbstractThe addition of metal atoms within the matrix of diamond-like carbon films leads to the improvement of their mechanical properties. The present paper discusses the relationship between the composition and morphology of metal-containing (W, Nb, Mo, Ti) diamond-like carbon thin films deposited at room temperature by reactive magnetron sputtering from a metal target in an argon and methane atmosphere. Composition was measured either by electron microprobe technique or by X-ray photoelectron spectroscopy and shows a smooth variation with relative methane flow. High relative methane flows lead to a bulk saturation of carbon atoms, which leads to a lack of homogeneity in the films as confirmed by secondary ion mass spectrometry. Cross-section micrographs were observed by transmission electron microscopy and revealed a structure strongly influenced by the metal inserted and its abundance. The surface pattern obtained by scanning electrochemical potential microscopy provided the metallicity distribution. These measurements were completed with atomic force microscopy of the surface. Selected area electron diffraction and X-ray diffraction measurements provided data of the crystalline structure along with nano-crystallite size. High-resolution transmission electron microscopy provided images of these crystallites.
Description6 pages, 5 figures.-- Printed version published Jun 22, 2005.-- Issue title: "EMRS 2004, Symposium J" (Strasbourg, May 24-28, 2004).
Publisher version (URL)http://dx.doi.org/10.1016/j.tsf.2004.11.178
URIhttp://hdl.handle.net/10261/16044
DOI10.1016/j.tsf.2004.11.178
ISSN0040-6090
Appears in Collections:(IQAC) Artículos

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