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Título: | Cobalt(II)heteroarylalkenolate precursor for homogeneous Co3O4 coatings by atomic layer deposition |
Autor: | Büyükyazi, Mehtap; Fischer, Thomas; Penmgei, Yu; Coll, Mariona CSIC ORCID; Mathur, Sanjay | Fecha de publicación: | 1-sep-2017 | Editor: | Royal Society of Chemistry (UK) | Citación: | Dalton Transactions: 10.1039/C7DT02757E (2017) | Resumen: | We present a new and efficient cobalt precursor, CoII(DMOCHCOCF3)2, to prepare Co3O4 thin films and conformal coatings. In the synthesis of this Co complex, heteroaryl moieties and CF3-groups were combined leading to high thermal stability and volatility precursor. The suitability of this precursor for ALD deposition was tested on flat silicon substrates and TiO2/C nanofibers upon process optimization. Deposition at 200ºC results in homogeneous and smooth Co3O4 thin films with a growth per cycle of 0.02 nm/cycle. Conformal coatings have been successfully obtained on TiO2/C nanofibers being thus an attractive platform for surface chemistry studies on high aspect ratio structures for future photocatalysts, sensors, supercapacitors and batteries. | Versión del editor: | http://dx.doi.org/10.1039/C7DT02757E | URI: | http://hdl.handle.net/10261/154832 | DOI: | 10.1039/C7DT02757E | ISSN: | 1477-9226 |
Aparece en las colecciones: | (ICMAB) Artículos |
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Buyukyazi_DaltonTrans_2017_postprint.pdf | 946,03 kB | Adobe PDF | Visualizar/Abrir |
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