Por favor, use este identificador para citar o enlazar a este item:
http://hdl.handle.net/10261/142087
COMPARTIR / EXPORTAR:
SHARE CORE BASE | |
Visualizar otros formatos: MARC | Dublin Core | RDF | ORE | MODS | METS | DIDL | DATACITE | |
Campo DC | Valor | Lengua/Idioma |
---|---|---|
dc.contributor.author | Pini, Valerio | - |
dc.contributor.author | Kosaka, Priscila M. | - |
dc.contributor.author | Ruz Martínez, José Jaime | - |
dc.contributor.author | Malvar, Óscar | - |
dc.contributor.author | Encinar, Mario | - |
dc.contributor.author | Tamayo de Miguel, Francisco Javier | - |
dc.contributor.author | Calleja, Montserrat | - |
dc.date.accessioned | 2017-01-04T08:48:27Z | - |
dc.date.available | 2017-01-04T08:48:27Z | - |
dc.date.issued | 2016-06-21 | - |
dc.identifier | doi: 10.3390/s16060926 | - |
dc.identifier.citation | Sensors 16(6): 926 (2016) | - |
dc.identifier.uri | http://hdl.handle.net/10261/142087 | - |
dc.description.abstract | Thickness characterization of thin films is of primary importance in a variety of nanotechnology applications, either in the semiconductor industry, quality control in nanofabrication processes or engineering of nanoelectromechanical systems (NEMS) because small thickness variability can strongly compromise the device performance. Here, we present an alternative optical method in bright field mode called Spatially Multiplexed Micro-Spectrophotometry that allows rapid and non-destructive characterization of thin films over areas of mm<sup>2</sup> and with 1 μm of lateral resolution. We demonstrate an accuracy of 0.1% in the thickness characterization through measurements performed on four microcantilevers that expand an area of 1.8 mm<sup>2</sup> in one minute of analysis time. The measured thickness variation in the range of few tens of nm translates into a mechanical variability that produces an error of up to 2% in the response of the studied devices when they are used to measure surface stress variations. | - |
dc.description.sponsorship | The authors acknowledge the financial support by European Research Council through Starting Grant NANOFORCELLS (ERC-StG-2011-278860). P. M. Kosaka acknowledges funding from the Fundación General CSIC ComFuturo program. We acknowledge support by the CSIC Open Access Publication Initiative through its Unit of Information Resources for Research (URICI) | - |
dc.publisher | Multidisciplinary Digital Publishing Institute | es_ES |
dc.rights | openAccess | - |
dc.title | Spatially Multiplexed Micro-Spectrophotometry in Bright Field Mode for Thin Film Characterization | - |
dc.type | artículo | - |
dc.identifier.doi | 10.3390/s16060926 | - |
dc.date.updated | 2017-01-04T08:48:27Z | - |
dc.contributor.funder | European Research Council | - |
dc.contributor.funder | Consejo Superior de Investigaciones Científicas (España) | - |
dc.identifier.funder | http://dx.doi.org/10.13039/501100000781 | es_ES |
dc.identifier.funder | http://dx.doi.org/10.13039/501100003339 | es_ES |
dc.identifier.pmid | 27338398 | - |
dc.type.coar | http://purl.org/coar/resource_type/c_6501 | es_ES |
item.openairecristype | http://purl.org/coar/resource_type/c_18cf | - |
item.fulltext | With Fulltext | - |
item.cerifentitytype | Publications | - |
item.openairetype | artículo | - |
item.grantfulltext | open | - |
Aparece en las colecciones: | (IMN-CNM) Artículos |
Ficheros en este ítem:
Fichero | Descripción | Tamaño | Formato | |
---|---|---|---|---|
sensors-16-00926.pdf | 3,45 MB | Adobe PDF | Visualizar/Abrir |
CORE Recommender
SCOPUSTM
Citations
1
checked on 15-abr-2024
WEB OF SCIENCETM
Citations
1
checked on 23-feb-2024
Page view(s)
279
checked on 17-abr-2024
Download(s)
228
checked on 17-abr-2024
Google ScholarTM
Check
Altmetric
Altmetric
NOTA: Los ítems de Digital.CSIC están protegidos por copyright, con todos los derechos reservados, a menos que se indique lo contrario.