English   español  
Por favor, use este identificador para citar o enlazar a este item: http://hdl.handle.net/10261/142087
Compartir / Impacto:
Estadísticas
Add this article to your Mendeley library MendeleyBASE
Visualizar otros formatos: MARC | Dublin Core | RDF | ORE | MODS | METS | DIDL
Título

Spatially Multiplexed Micro-Spectrophotometry in Bright Field Mode for Thin Film Characterization

AutorPini, Valerio ; Kosaka, Priscila M. ; Ruz Martínez, José Jaime ; Malvar, Óscar ; Encinar, Mario ; Tamayo, Javier; Calleja, Montserrat
Fecha de publicación21-jun-2016
EditorMultidisciplinary Digital Publishing Institute
CitaciónSensors 16(6): 926 (2016)
ResumenThickness characterization of thin films is of primary importance in a variety of nanotechnology applications, either in the semiconductor industry, quality control in nanofabrication processes or engineering of nanoelectromechanical systems (NEMS) because small thickness variability can strongly compromise the device performance. Here, we present an alternative optical method in bright field mode called Spatially Multiplexed Micro-Spectrophotometry that allows rapid and non-destructive characterization of thin films over areas of mm<sup>2</sup> and with 1 μm of lateral resolution. We demonstrate an accuracy of 0.1% in the thickness characterization through measurements performed on four microcantilevers that expand an area of 1.8 mm<sup>2</sup> in one minute of analysis time. The measured thickness variation in the range of few tens of nm translates into a mechanical variability that produces an error of up to 2% in the response of the studied devices when they are used to measure surface stress variations.
URIhttp://hdl.handle.net/10261/142087
DOIhttp://dx.doi.org/10.3390/s16060926
Identificadoresdoi: 10.3390/s16060926
Aparece en las colecciones: (IMN-CNM) Artículos
Ficheros en este ítem:
Fichero Descripción Tamaño Formato  
sensors-16-00926.pdf3,45 MBAdobe PDFVista previa
Visualizar/Abrir
Mostrar el registro completo
 


NOTA: Los ítems de Digital.CSIC están protegidos por copyright, con todos los derechos reservados, a menos que se indique lo contrario.