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Título

A novel fabrication technique for free-hanging homogeneous polymeric cantilever waveguides

AutorNordström, M.; Calleja, Montserrat ; Hübner, Jörg; Boisen, Anja
Palabras claveNanomechanical sensor
Cantilever polymer
Fecha de publicación3-dic-2007
EditorInstitute of Physics Publishing
ResumenWe present a novel bonding technique developed for the fabrication of a cantilever-based biosensing system with integrated optical read-out. The read-out mechanism is based on single-mode waveguides fabricated monolithically in SU-8. For optimal operation of the read-out mode, the cantilever waveguides should be homogenous and this bonding technique ensures free-hanging cantilevers that are surrounded by the same material for bottom and top claddings. The bonding step is necessary because SU-8 is a negative resist where free-hanging structures cannot be fabricated directly. This paper gives details on the processing aspects and the parameters of the fabrication steps
Versión del editorhttp://dx.doi.org/10.1088/0960-1317/18/1/015017
URIhttp://hdl.handle.net/10261/14075
DOI10.1088/0960-1317/18/1/015017
ISSN0960-1317
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