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Title

Study of the origin of bending induced by bimetallic effect on microcantilevers

AuthorsRamos Vega, Daniel ; Mertens, Johann ; Calleja, Montserrat ; Tamayo de Miguel, Francisco Javier
KeywordsCantilever
Stress
Strain
Temperature
Stoney’s equation
Axial force
Profile
Issue Date5-Sep-2007
PublisherMultidisciplinary Digital Publishing Institute
CitationSensors 7 (2007), 1757-1765
AbstractAn analytical model for predicting the deflection and force of a bimaterial cantilever is presented. We introduce the clamping effect characterised by an axial load upon temperature changes. This new approach predicts a non linear thermal dependence of cantilever strain. A profilometry technique was used to measure the thermal strain. Comparison with experimental results is used to verify the model. The concordance of the analytical model presented with experimental measurements is better than 10%..
Publisher version (URL)http://www.mdpi.org
URIhttp://hdl.handle.net/10261/13810
ISSN1424-8220
Appears in Collections:(IMN-CNM) Artículos
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