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Nanocrystalline Ferroelectric BiFeO3 Thin Films by Low-Temperature Atomic Layer Deposition

AuthorsColl, Mariona ; Gázquez, Jaume ; Fina, Ignasi ; Khayat, Zakariya; Quindeau, Andy; Alexe, Marin; Varela, María; Trolier-McKinstry, Susan; Obradors, Xavier ; Puig Molina, Teresa
KeywordsFerroelectric perovskite
Atomic layer deposition
Thin film
Issue Date22-Sep-2015
PublisherAmerican Chemical Society
CitationChemistry of Materials 27(18): 6322- 6328 (2015)
Abstract© 2015 American Chemical Society. In this work, ferroelectricity is identified in nanocrystalline BiFeO<inf>3</inf> (BFO) thin films prepared by low-temperature atomic layer deposition. A combination of X-ray diffraction, reflection high energy electron diffraction, and scanning transmission electron microscopy analysis indicates that the as-deposited films (250 °C) consist of BFO nanocrystals embedded in an amorphous matrix. Postannealing at 650 °C for 60 min converts the sample to a crystalline film on a SrTiO<inf>3</inf> substrate. Piezoelectric force microscopy demonstrates the existence of ferroelectricity in both as-deposited and postannealed films. The ferroelectric behavior in the as-deposited stage is attributed to the presence of nanocrystals. Finally, a band gap of 2.7 eV was measured by spectroscopic ellipsometry. This study opens broad possibilities toward ferroelectric oxides on 3D substrates and also for the development of new ferroelectric perovskites prepared at low temperature.
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