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Physics of corrosion-resistant Mg/SiC multilayer coatings for EUV sources

AuthorsSoufli, R.; Fernández-Perea, Mónica; Walton, C. C.; Vidal-Dasilva, M. ; Robinson, J. C.; Baker, S. L.; Alameda, J. B.; Rodríguez de Marcos, Luís ; Méndez, José Antonio ; Larruquert, Juan Ignacio ; Gullikson, E. M.
Issue Date13-Apr-2015
PublisherThe International Society for Optics and Photonics
CitationSPIE Optics + Optoelectronics (2015)
AbstractThe 25-80 nm wavelength region is part of the operational range of extreme ultraviolet (EUV) synchrotron, free-electron laser and tabletop laser sources, which often require multilayer-coated reflective optics. Mg/ SiC possesses a unique combination of favorable reflective properties in the 25-80 nm wavelength range: high reflectance, near-zero film stress, good spectral selectivity and thermal stability up to 350? C. However, Mg/SiC suffers from Mg-related atmospheric corrosion, an insidious and unpredictable problem which completely degrades reflectance and has prevented Mg/SiC from being used in scientific experiments and applications that require long lifetime stability. In recent work, we elucidated the origins and mechanisms of corrosion propagation within Mg/SiC multilayers and demonstrated efficient and simple-to-implement Al-Mg corrosion barriers for Mg/SiC multilayers. We also demonstrated Mg/SiC multilayers with corrosion barriers which achieve high reflectance in up to three narrow bands simultaneously. In this presentation, we focus on the physics of spontaneous intermixing and amorphization of the Al and Mg layers inside the Al-Mg corrosion barriers. We also discuss the long-term reflective properties of a variety of Mg/SiC multilayer concepts, with and without corrosion barriers. This work was performed under the auspices of the U.S. Department of Energy by Lawrence Livermore National Laboratory under Contract No. DE-AC52-07NA27344.
DescriptionInvited paper; Prague, Czech Republic, 13–16 April 2015
Appears in Collections:(CAB) Comunicaciones congresos
(CFMAC-IO) Comunicaciones congresos
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