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Title

Plasma and surface diagnostics of silicon nitride thin film coatings generated by SiH4+NH3 RF discharges

AuthorsRomero, M.F.; Sanz, M.M.; Muñoz, E.; Jiménez, A.; Tanarro, Isabel
Issue Date9-Sep-2008
PublisherSociedad Española de Química Analítica
CitationXXI Reunión Nacional de Espectroscopia (2008)
V Congreso Ibérico de Espectroscopia (2008)
DescriptionXXI Reunión Nacional de Espectroscopia. V Congreso Ibérico de Espectroscopia, Murcia, 9-11 de Septiembre de 2008
URIhttp://hdl.handle.net/10261/134526
Appears in Collections:(CFMAC-IEM) Comunicaciones congresos
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