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http://hdl.handle.net/10261/132408
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dc.contributor.author | Prieto-González, Iván | - |
dc.contributor.author | Muñoz-Camuñez, Luis Enrique | - |
dc.contributor.author | González Taboada, Alfonso | - |
dc.contributor.author | Robles Urdiales, Carmen | - |
dc.contributor.author | Ripalda, José María | - |
dc.contributor.author | Postigo, Pablo Aitor | - |
dc.date.accessioned | 2016-05-19T12:43:22Z | - |
dc.date.available | 2016-05-19T12:43:22Z | - |
dc.date.issued | 2014 | - |
dc.identifier | issn: 0734-211X | - |
dc.identifier.citation | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 32: 011204 (2014) | - |
dc.identifier.uri | http://hdl.handle.net/10261/132408 | - |
dc.description.abstract | The authors demonstrate high quality factor GaAs-based L9 photonic crystal microcavities (PCMs) with embedded InAsSb quantum dots with emission in 1.3¿¿m at room temperature. The fabrication process uses reactive ion beam etching with a CHF3/N2 gas mixture and reactive ion etching with a BCl3/N2 gas mixture to form PCMs on air-suspended slabs. An optimum N2 partial flux content of 0.65 and a successful removal of deposits formed during the membrane release by a fast wet etching in HF provide optical quality factors (Q-factors) as high as ~30 000. | - |
dc.description.sponsorship | The authors thank Spanish MINECO TEC2011-29120-C05-04, ENE2012-37804-C02-02, and CAM S2009ESP-1503, S2009/ENE-1477. I.P., L.E.M., and C.R. acknowledge the FPI and JAE program. The authors thank Francisco Javier Delgado and Sergio Molina from UCA for TEM measurements, and Andrés Valera from ICMM-CSIC for EDAX analysis. | - |
dc.publisher | American Vacuum Society | - |
dc.relation | S2009/ESP-1503/Q&CLIGHT | - |
dc.relation | S2009/ENE-1477/NUMANCIA-2 | - |
dc.rights | closedAccess | - |
dc.title | Fabrication of high quality factor GaAs/InAsSb photonic crystal microcavities by inductively coupled plasma etching and fast wet etching | - |
dc.type | artículo | - |
dc.identifier.doi | 10.1116/1.4836517 | - |
dc.relation.publisherversion | http://dx.doi.org/10.1116/1.4836517 | - |
dc.date.updated | 2016-05-19T12:43:22Z | - |
dc.description.version | Peer Reviewed | - |
dc.language.rfc3066 | eng | - |
dc.contributor.funder | Ministerio de Economía y Competitividad (España) | - |
dc.contributor.funder | Comunidad de Madrid | - |
dc.contributor.funder | European Commission | - |
dc.relation.csic | Sí | - |
dc.identifier.funder | http://dx.doi.org/10.13039/501100003329 | es_ES |
dc.identifier.funder | http://dx.doi.org/10.13039/501100000780 | es_ES |
dc.identifier.funder | http://dx.doi.org/10.13039/100012818 | es_ES |
dc.type.coar | http://purl.org/coar/resource_type/c_6501 | es_ES |
item.openairecristype | http://purl.org/coar/resource_type/c_18cf | - |
item.fulltext | No Fulltext | - |
item.grantfulltext | none | - |
item.openairetype | artículo | - |
item.cerifentitytype | Publications | - |
Aparece en las colecciones: | (IMN-CNM) Artículos |
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accesoRestringido.pdf | 15,38 kB | Adobe PDF | Visualizar/Abrir |
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