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Title

Tuning piezoresistive transduction in nanomechanical resonators by geometrical asymmetries

AuthorsLlobet, J.; Sansa Perna, Marc; Lorenzoni, Matteo; Borrisé, Xavier ; San Paulo, Álvaro ; Perez Murano, Francesc X.
Issue Date2015
PublisherAmerican Institute of Physics
CitationApplied Physics Letters 107(7): 073104 (2015)
AbstractThe effect of geometrical asymmetries on the piezoresistive transduction in suspended double clamped beam nanomechanical resonators is investigated. Tapered silicon nano-beams, fabricated using a fast and flexible prototyping method, are employed to determine how the asymmetry affects the transduced piezoresistive signal for different mechanical resonant modes. This effect is attributed to the modulation of the strain in pre-strained double clamped beams, and it is confirmed by means of finite element simulations.
DescriptionUnder the terms of the Creative Commons Attribution (CC BY) license to their work.
Publisher version (URL)http://dx.doi.org/10.1063/1.4928709
URIhttp://hdl.handle.net/10261/127218
DOI10.1063/1.4928709
Identifiersissn: 0003-6951
e-issn: 1077-3118
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