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Title

Tensile strain mapping in flat germanium membranes

AuthorsRhead, S. D.; Shah, V. A.; Reparaz, J. S. ; Sotomayor Torres, C. M.
Issue Date2014
PublisherAmerican Institute of Physics
CitationApplied Physics Letters 104(17): 172107 (2014)
AbstractScanning X-ray micro-diffraction has been used as a non-destructive probe of the local crystalline quality of a thin suspended germanium (Ge) membrane. A series of reciprocal space maps were obtained with ~4 μm spatial resolution, from which detailed information on the strain distribution, thickness, and crystalline tilt of the membrane was obtained. We are able to detect a systematic strain variation across the membranes, but show that this is negligible in the context of using the membranes as platforms for further growth. In addition, we show evidence that the interface and surface quality is improved by suspending the Ge.
DescriptionUnder the terms of the Creative Commons Attribution (CC BY) license to their work.-- et al.
Publisher version (URL)http://dx.doi.org/10.1063/1.4874836
URIhttp://hdl.handle.net/10261/127206
DOI10.1063/1.4874836
Identifiersdoi: 10.1063/1.4874836
issn: 0003-6951
e-issn: 1077-3118
Appears in Collections:(CIN2) Artículos
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