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dc.contributor.authorTanarro, Isabel-
dc.contributor.authorHerrero, Víctor J.-
dc.date.accessioned2009-04-17T12:45:52Z-
dc.date.available2009-04-17T12:45:52Z-
dc.date.issued2009-07-15-
dc.identifier.citationPlasma Sources Science and Technology 18(3): 034007 (2009)-
dc.identifier.issn0963-0252-
dc.identifier.urihttp://hdl.handle.net/10261/12406-
dc.description9 pages, 9 figures.-- PACS nrs.: 51.50.+v, 52.20.Hv, 52.25.Jm, 52.40.Kh, 82.33.Xj.-- Printed version published Aug 2009.en_US
dc.description.abstractEnergy distributions of ions generated in hollow cathode low pressures dc discharges of different gases and gas mixtures containing Ar, H2, N2, O2 or CH4 are studied by quadrupole mass spectrometry. The ions are sampled through a small diaphragm in the grounded cathode. The measured distributions are mostly determined by the acceleration of ions in the sheath region between the negative glow and the cathode, displaying in general a narrow peak centred at energies close to the anode potential, but with specific features for the distinct ions. It is shown that information about ion production and sheath collision processes can be derived from the shapes of the different energy distributions. In some cases these distributions are used for the estimation of the relative abundance of ions with the same mass/charge ratio but different compositions in complex gas mixtures.en_US
dc.description.sponsorshipThis work has been funded by the DGI (MEC) of Spain under grants ENE 2006-14577-C04-03/FTN and FIS 2007-61686.en_US
dc.format.extent361052 bytes-
dc.format.mimetypeapplication/pdf-
dc.language.isoengen_US
dc.publisherInstitute of Physics Publishing-
dc.rightsopenAccessen_US
dc.subjectIon energy distributionen_US
dc.subjectPlasma sheathen_US
dc.subjectDC dischargeen_US
dc.subjectHollow cathode dischargeen_US
dc.subjectIon kineticsen_US
dc.subjectIon collisionsen_US
dc.subjectAr, H2, N2, O2 and CH4 plasmasen_US
dc.titleIon energy distributions for the identification of active species and processes in low pressure hollow cathode dischargesen_US
dc.typeartículoen_US
dc.identifier.doi10.1088/0963-0252/18/3/034007-
dc.description.peerreviewedPeer revieweden_US
dc.relation.publisherversionhttp://dx.doi.org/10.1088/0963-0252/18/3/034007-
dc.type.coarhttp://purl.org/coar/resource_type/c_6501es_ES
item.openairetypeartículo-
item.cerifentitytypePublications-
item.languageiso639-1en-
item.grantfulltextopen-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.fulltextWith Fulltext-
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