Hydrogenated amorphous silicon deposited by high pressure sputtering for HIT solar cells

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Campo DC	Valor	Lengua/Idioma
dc.contributor.author	García-Hernández, Mar	-
dc.contributor.author	Ferrer, F. J.	-
dc.date.accessioned	2015-10-13T11:41:22Z	-
dc.date.available	2015-10-13T11:41:22Z	-
dc.date.issued	2013	-
dc.identifier.citation	9th Spanish Conference on Electron Devices (2013)	-
dc.identifier.uri	http://hdl.handle.net/10261/123292	-
dc.description	Trabajo presentado a la 9th Spanish Conference on Electron Devices (CDE) celebrada en Valladolid (España) del 12 al 14 de febrero de 2013.-- et al.	-
dc.description.abstract	Hydrogenated amorphous silicon thin films were deposited using a high pressure sputtering (HPS) system. In this work, we have studied the composition and optical properties of the films (band-gap, absorption coefficient), and their dependence with the deposition parameters. For films deposited at high pressure (1 mbar), composition measurements show a critical dependence of the purity of the films with the RF power. Films manufactured with RF-power above 80W exhibit good properties for future application, similar to the films deposited by CVD (Chemical Vapor Deposition) for hydrogenated amorphous silicon.	-
dc.description.sponsorship	NUMANCIA II (Grant No. S-2009/ENE/1477). Research by Eric Garcia-Hemme was partially supported by a PICATA predoctoral fellowship of the Moncloa Campus of International Excellence (UCM-UPM). J. Olea and D. Pastor thanks Professor A. Martí and Professor A. Luque for useful discussions and guidance and acknowledge financial support from the MICINN within the program Juan de la Cierva (JCI-2011-10402 and JCI-2011-11471), under which their research was undertaken.	-
dc.description.sponsorship	S-2009/ENE/1477/NUMANCIA-2.	-
dc.relation.isversionof	Postprint	-
dc.rights	openAccess	-
dc.title	Hydrogenated amorphous silicon deposited by high pressure sputtering for HIT solar cells	-
dc.type	comunicación de congreso	-
dc.date.updated	2015-10-13T11:41:23Z	-
dc.description.version	Peer Reviewed	-
dc.language.rfc3066	eng	-
dc.contributor.funder	Comunidad de Madrid	-
dc.contributor.funder	Universidad Complutense de Madrid	-
dc.contributor.funder	Ministerio de Ciencia e Innovación (España)	-
dc.contributor.funder	Universidad Politécnica de Madrid	-
dc.relation.csic	Sí	-
dc.identifier.funder	http://dx.doi.org/10.13039/501100002911	es_ES
dc.identifier.funder	http://dx.doi.org/10.13039/501100004837	es_ES
dc.identifier.funder	http://dx.doi.org/10.13039/501100003759	es_ES
dc.identifier.funder	http://dx.doi.org/10.13039/100012818	es_ES
dc.type.coar	http://purl.org/coar/resource_type/c_5794	es_ES
item.fulltext	With Fulltext	-
item.openairecristype	http://purl.org/coar/resource_type/c_18cf	-
item.cerifentitytype	Publications	-
item.grantfulltext	open	-
item.openairetype	comunicación de congreso	-
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