English   español  
Por favor, use este identificador para citar o enlazar a este item: http://hdl.handle.net/10261/117456
COMPARTIR / IMPACTO:
Estadísticas
logo share SHARE logo core CORE   Add this article to your Mendeley library MendeleyBASE

Visualizar otros formatos: MARC | Dublin Core | RDF | ORE | MODS | METS | DIDL
Exportar a otros formatos:
Título

Fabrication of Optical Multilayer Devices from Porous Silicon Coatings with Closed Porosity by Magnetron Sputtering

AutorCaballero-Hernández, J. ; Godinho, V. ; Lacroix, Bertrand ; Jiménez de Haro, María del Carmen ; Jamon, D.; Fernández-Camacho, A.
Palabras clavePorous silicon
Magnetron sputtering
Bragg reflector
Optical microcavity
Lateral gradient
Fecha de publicación2015
EditorAmerican Chemical Society
CitaciónACS Applied Materials and Interfaces, 7(25): 13889-13897 (2015)
ResumenThe fabrication of single-material photonic-multilayer devices is explored using a new methodology to produce porous silicon layers by magnetron sputtering. Our bottom-up methodology produces highly stable amorphous porous silicon films with a controlled refractive index using magnetron sputtering and incorporating a large amount of deposition gas inside the closed pores. The influence of the substrate bias on the formation of the closed porosity was explored here for the first time when He was used as the deposition gas. We successfully simulated, designed, and characterized Bragg reflectors and an optical microcavity that integrates these porous layers. The sharp interfaces between the dense and porous layers combined with the adequate control of the refractive index and thickness allowed for excellent agreement between the simulation and the experiments. The versatility of the magnetron sputtering technique allowed for the preparation of these structures for a wide range of substrates such as polymers while also taking advantage of the oblique angle deposition to prepare Bragg reflectors with a controlled lateral gradient in the stop band wavelengths
Versión del editorhttp://dx.doi.org/10.1021/acsami.5b02356
URIhttp://hdl.handle.net/10261/117456
DOI10.1021/acsami.5b02356
E-ISSN1944-8252
Aparece en las colecciones: (ICMS) Artículos
Ficheros en este ítem:
Fichero Descripción Tamaño Formato  
Godinho- ACS Applied materials and interfaces final revison.docx6,62 MBMicrosoft Word XMLVisualizar/Abrir
Mostrar el registro completo
 

Artículos relacionados:


NOTA: Los ítems de Digital.CSIC están protegidos por copyright, con todos los derechos reservados, a menos que se indique lo contrario.