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dc.contributor.authorCagliani, Alberto-
dc.contributor.authorPini, Valerio-
dc.contributor.authorTamayo de Miguel, Francisco Javier-
dc.contributor.authorCalleja, Montserrat-
dc.contributor.authorDavis, Zachary James-
dc.date.accessioned2015-01-30T11:42:06Z-
dc.date.available2015-01-30T11:42:06Z-
dc.date.issued2014-10-31-
dc.identifierissn: 0925-4005-
dc.identifier.citationSensors and Actuators - B - Chemical Biochemical Sensors 202: 339-345 (2014)-
dc.identifier.urihttp://hdl.handle.net/10261/109986-
dc.description.abstractFor highly integrated systems for bio and chemical analysis a precise and integrated measurement of temperature is of fundamental importance. We have developed an ultrasensitive thermometer based on a micromechanical resonator for operation in air. The high quality factor and the strong temperature dependence of the resonance frequency of these bulk microresonators enable accurate temperature measurements. Here, we delineate the conditions to decouple the temperature effect on the resonance frequency, from the water adsorption/desorption on the resonator surface that happens when it is operated in air. This study enables high temperature resolution measurements, as well as the possibility of monitoring adsorption and desorption processes on the resonator surface with a resolution of 0.007 water molecules per nm2. These devices reach a temperature resolution of 3 mK in air, which is one of the best ever reported temperature resolution for resonator based thermometers. © 2014 Elsevier B.V.-
dc.description.sponsorshipWe acknowledge financial support from the Spanish Science Ministry (MINECO) through projects MAT2012-36197; and from European Research Council through Starting Grant NANOFORCELLS (ERC-StG-2011-278860).-
dc.publisherElsevier-
dc.relationinfo:eu-repo/grantAgreement/EC/FP7/278860-
dc.relation.isversionofPostprint-
dc.rightsopenAccess-
dc.subjectTemperature sensor-
dc.subjectAtmospheric pressure-
dc.subjectMass sensitivity-
dc.subjectHumidity-
dc.subjectMicromechanical resonator-
dc.titleUltrasensitive thermometer for atmospheric pressure operation based on a micromechanical resonator-
dc.typeArtículo-
dc.identifier.doi10.1016/j.snb.2014.05.076-
dc.relation.publisherversionhttp://dx.doi.org/10.1016/j.snb.2014.05.076-
dc.date.updated2015-01-30T11:42:06Z-
dc.description.versionPeer Reviewed-
dc.language.rfc3066eng-
dc.contributor.funderMinisterio de Economía y Competitividad (España)-
dc.contributor.funderEuropean Commission-
dc.relation.csic-
dc.identifier.funderhttp://dx.doi.org/10.13039/501100003329es_ES
dc.identifier.funderhttp://dx.doi.org/10.13039/501100000780es_ES
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