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Extended X-ray absorption fine structure (EXAFS) investigations of Ti bonding environment in sputter-deposited nanocomposite TiBC/a-C thin films

AuthorsEndrino, José Luis ; Abad, Manuel D. ; Gago, Raúl ; Horwat, D.; Jiménez, I.; Sánchez-López, J.C.
Issue Date2014
PublisherInstitute of Physics Publishing
CitationIOP Conference Series - Materials Science and Enginnering, 12(1):012012 (2014)
AbstractIn this study, we have successfully used the extended X-ray absorption fine structure (EXAFS) technique at the Ti-K edge to extract the local structure in a set of nanocomposite TiBC/a-C coatings deposited by a combined d.c.-pulsed and r.f.-magnetron sputtering deposition process. The sequence of Fourier transform spectra in the deposited films shows that there is an increase in the number of Ti-C bonds in the films of higher carbon content in parallel with the increment of the total carbon content. In addition, Ti-K EXAFS spectra indicate that in all the deposited TiBC/a-C films, first-shell neighbours are in a nearer structural arrangement than the one expected for a bulk hexagonal TiB2, which could be due to the formation of mixed Ti-B-C compound in a structural unit similar to the one found in h-TiB2.
Publisher version (URL)http://dx.doi.org/10.1088/1757-899X/12/1/012012Document
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