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Assessment of Replica Quality in Polymer Gratings Fabricated by Nanoimprint Lithography by means of Grazing Incidence Small Angle X-ray Scattering

AuthorsSoccio, Michelina ; Ezquerra, Tiberio A. ; García-Gutiérrez, Mari Cruz ; Rueda, Daniel R. ; Rebollar, Esther ; Alayo, N.; Perez Murano, Francesc X.
Issue Date2013
PublisherCSIC-ICN Centro de Investigación en Nanociencia y Nanotecnología (CIN2)
CitationNNT 2013, 12th International Conference on Nanoimprint and Nanoprint Technology
Description12th International Conference on Nanoimprint and Nanoprint Technology, Barcelona, Spain, October 21-23, 2013. nntconf.org/2013_archive/
Appears in Collections:(CFMAC-IEM) Comunicaciones congresos
(IMB-CNM) Comunicaciones congresos
(IQFR) Comunicaciones congresos
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