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Growth of WxSiyOz thin films by reactive magnetron sputtering from a single heterogeneous target

AuthorsÁlvarez, Rafael ; Gil-Rostra, J. ; Cotrino, José ; González-Elipe, Agustín R. ; Palmero, Alberto
Issue DateSep-2013
PublisherSociedad Española de Materiales
CitationEuroMat 2013 – European Congress and Exhibition on Advanced Materials and Processes, Sevilla (España)
DescriptionPresentación en la conferencia “EuroMat 2013”
Appears in Collections:(ICMS) Comunicaciones congresos
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