2024-03-29T14:50:39Zhttp://digital.csic.es/dspace-oai/requestoai:digital.csic.es:10261/1364522021-05-11T14:21:32Zcom_10261_46com_10261_3com_10261_10252col_10261_299col_10261_10253
Ultraviolet pulsed laser crystallization of Ba0.8Sr0.2TiO3 films on LaNiO3-coated silicon substrates
Queraltó, Albert
Pérez del Pino, Ángel
Mata, Maria de la
Tristany, Mar
Obradors, Xavier
Puig Molina, Teresa
Trolier-McKinstry, Susan
Ministerio de Economía y Competitividad (España)
Generalitat de Catalunya
Lasercrystallization
BaTiO3 and titanates
Sol–gel processes
Films
In this work, BaSrTiO (BST) films on LaNiO-buffered SiO/Si (LNO/SiO/Si) substrates were crystallized by pulsed laser irradiation. Solution-derived amorphous barium-strontium-titanate precursor layers were crystallized with a KrF excimer laser in oxygen ambient at fluences ranging from 50 to 75 mJ cm. With the substrate temperature set to 500 °C, the number of pulses and film thickness were varied until high-quality crystallinity could be achieved. It was found that films with a thickness of 40 nm are fully crystallized with a uniaxial {00l} orientation which is predetermined by the LaNiO orientation. On the other hand, for 160 nm thick films, crystallization was observed after 12,000 pulses in the 70 nm close to the surface, while the rest of the film remained amorphous. The large temperature difference between the film surface and interface due to the low thermal conductivity of the amorphous BST is suggested as the origin of this behavior. Films thicker than 80 nm cracked on crystallization due to the stress caused by the different thermal expansion coefficients of film and substrate, as well as the large temperature variations within the BST film.
This work was financed by the Ministry of Economy and
Competitiveness under the projects MAT2011-28874-C02-01,
MAT2014-51778-C2-1-R, ENE2014-56109-C3-3- Rand Consolider Nanoselect CSD2007-00041, and by Generalitat de
Catalunya (2015SGR753 and Xarmae). AQ and Mdl Mare
also gratefulforJAE-Predocfellowship (E-08-2012-1321248)
and European Social Fund (E-08-2013-1028356)program.
Peer Reviewed
2016-09-07T10:23:19Z
2016-09-07T10:23:19Z
2016-02-15
2016-09-07T10:23:20Z
artículo
http://purl.org/coar/resource_type/c_6501
issn: 0272-8842
Ceramics International 42(3): 4039-4047 (2016)
http://hdl.handle.net/10261/136452
10.1016/j.ceramint.2015.11.075
http://dx.doi.org/10.13039/501100003329
http://dx.doi.org/10.13039/501100002809
#PLACEHOLDER_PARENT_METADATA_VALUE#
#PLACEHOLDER_PARENT_METADATA_VALUE#
info:eu-repo/grantAgreement/MINECO/Plan Estatal de Investigación Científica y Técnica y de Innovación 2013-2016/MAT2014-51778-C2-1-R
info:eu-repo/grantAgreement/MINECO/Plan Estatal de Investigación Científica y Técnica y de Innovación 2013-2016/ENE2014-56109-C3-3-R
Postprint
https://doi.org/10.1016/j.ceramint.2015.11.075
Sí
open
Elsevier