2024-03-29T09:27:43Zhttp://digital.csic.es/dspace-oai/requestoai:digital.csic.es:10261/988862020-05-20T11:03:42Zcom_10261_89com_10261_3col_10261_342
DIGITAL.CSIC
author
Redondo-Cubero, A.
author
Vázquez, Luis
author
Alves, L. C.
2014-06-25T08:20:27Z
2014-06-25T08:20:27Z
2014
Journal of Physics D: Applied Physics 47(18): 185302 (2014)
http://hdl.handle.net/10261/98886
10.1088/0022-3727/47/18/185302
The lateral and in-depth metal segregation of Au/Ni/Al/Ti ohmic contacts for GaN-based high electron mobility transistors were analysed as a function of the Al barrier's thickness (d). The surface of the contacts, characterized by atomic force and scanning electron microscopy, shows a transition from a fractal network of rough and complex island-like structures towards smoother and cauliflower-like fronts with increasing d. Rutherford backscattering spectrometry and energy dispersive x-ray spectroscopy (EDXS) at different energies were used to confirm the in-depth intermixing of the metals relevant for the final contact resistance. EDXS mapping reveals a significant lateral segregation too, where the resulting patterns depend on two competing NiAl x and AuAlx phases, the intermixing being controlled by the available amount of Al. The optimum ohmic resistance is not affected by the patterning process, but is mainly dependent on the partial interdiffusion of the metals. © 2014 IOP Publishing Ltd.
eng
closedAccess
Contacts
GaN
Segregation
Patterning
Influence of lateral and in-depth metal segregation on the patterning of ohmic contacts for GaN-based devices
artículo
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accesoRestringido.pdf.txt
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accesoRestringido.pdf.txt