2024-03-29T09:33:45Zhttp://digital.csic.es/dspace-oai/requestoai:digital.csic.es:10261/218102010-03-01T23:00:00Zcom_10261_36com_10261_4col_10261_289
DIGITAL.CSIC
author
Martínez Rodríguez, Luis Javier
author
Prieto-González, Iván
author
Alén, Benito
author
Postigo, Pablo Aitor
2010-03-02T11:03:33Z
2010-03-02T11:03:33Z
2009-06-23
Journal of Vacuum Science and Technology - Section B 27(4): 1801-1804 (2009)
1071-1023
http://hdl.handle.net/10261/21810
10.1116/1.3151832
The process of fabrication of high quality factor photonic crystal microcavities in slabs of InP with light emission at 1.5 µm is reported. The process includes e-beam lithography, reactive ion beam etching with a CHF3/N2 gas mixture, and reactive ion etching with a CH4/H2 gas mixture and O2 cycling. An InGaAs sacrificial layer is removed by chemical wet etching in order to obtain the photonic crystal membrane. Microphotoluminescense measurements have been performed to assess the quality of the fabricated structures. Quality factors up to
(next) 30 000 and laser emission with thresholds of excitation pump power around 34 µW have been obtained.
eng
closedAccess
Electron beam lithography
III-V semiconductors
Indium compounds
Membranes
Microcavities
Optical fabrication
Fabrication of high quality factor photonic crystal microcavities in InAsP/InP membranes combining reactive ion beam etching and reactive ion etching
artículo
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