2024-03-28T18:04:11Zhttp://digital.csic.es/dspace-oai/requestoai:digital.csic.es:10261/1117702022-09-30T10:31:56Zcom_10261_93com_10261_4col_10261_346
DIGITAL.CSIC
author
Vega, F.
author
Peláez, Ramón J.
author
Kuhn, Timo
author
Afonso, Carmen N.
author
Recio-Sánchez, Gonzalo
author
Martín Palma, R.J
2015-03-04T10:03:25Z
2015-03-04T10:03:25Z
2014-05-09
Journal of Applied Physics 115: 184902 (2014)
http://hdl.handle.net/10261/111770
10.1063/1.4875378
This work reports on the fabrication of 1D fringed patterns on nanostructured porous silicon (nanoPS) layers (563, 372, and 290nm thick). The patterns are fabricated by phase-mask laser interference using single pulses of an UV excimer laser (193nm, 20ns pulse duration). The method is a single-step and flexible approach to produce a large variety of patterns formed by alternate regions of almost untransformed nanoPS and regions where its surface has melted and transformed into Si nanoparticles (NPs). The role of laser fluence (5-80mJcm-2), and pattern period (6.3-16μm) on pattern features and surface structuring are discussed. The results show that the diameter of Si NPs increases with fluence up to a saturation value of 75nm for a fluence ≈40mJcm-2. In addition, the percentage of transformed to non-transformed region normalized to the pattern period follows similar fluence dependence regardless the period and thus becomes an excellent control parameter. This dependence is fitted within a thermal model that allows for predicting the in-depth profile of the pattern. The model assumes that transformation occurs whenever the laser-induced temperature increase reaches the melting temperature of nanoPS that has been found to be 0.7 of that of crystalline silicon for a porosity of around 79%. The role of thermal gradients across the pattern is discussed in the light of the experimental results and the calculated temperature profiles, and shows that the contribution of lateral thermal flow to melting is not significant for pattern periods ≥6.3μm. © 2014 AIP Publishing LLC.
eng
openAccess
Nanopatterning
Scanning electron microscopy
Silicon
Nanostructures
Surface patterning
Ultraviolet laser patterning of porous silicon
artículo
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