2024-03-28T07:46:40Zhttp://digital.csic.es/dspace-oai/requestoai:digital.csic.es:10261/210472020-05-26T11:34:57Zcom_10261_28com_10261_4com_10261_46com_10261_3col_10261_281col_10261_299
00925njm 22002777a 4500
dc
Verd Martorell, Jaume
author
Uranga del Monte, Arantxa
author
Abadal Berini, Gabriel
author
Teva, J.
author
Torres, F.
author
Perez Murano, Francesc X.
author
Fraxedas, J.
author
2007-07-02
Monolithic mass sensors for ultrasensitive mass detection in air conditions have been fabricated using a conventional 0.35 µm complementary metal-oxide-semiconductor (CMOS) process. The mass sensors are based on electrostatically excited submicrometer scale cantilevers integrated with CMOS electronics. The devices have been calibrated obtaining an experimental sensitivity of 6×10−11 g/cm2 Hz equivalent to 0.9 ag/Hz for locally deposited mass. Results from time-resolved mass measurements are also presented. An evaluation of the mass resolution have been performed obtaining a value of 2.4×10−17 g in air conditions, resulting in an improvement of these devices from previous works in terms of sensitivity, resolution, and fabrication process complexity.
Applied Physics Letters 91(1): 013501 (2007)
0003-6951
http://hdl.handle.net/10261/21047
10.1063/1.2753120
Monolithic mass sensor fabricated using a conventional technology with attogram resolution in air conditions