2024-03-29T10:00:27Zhttp://digital.csic.es/dspace-oai/requestoai:digital.csic.es:10261/656982017-06-26T12:29:01Zcom_10261_28com_10261_4col_10261_281
2013-02-02T20:37:53Z
urn:hdl:10261/65698
Micro- and nano-electromechanical systems for [bio]molecular analysis
Bausells, Joan
MEMS
NEMS
Microcantilever
Biosensors
Micro- and nano-mechanical structures fabricated by silicon micromachining technology can be used as transducing elements in [bio]chemical sensors. Cantilever beams with lengths in the tens of micrometers range and widths and thicknesses in the micrometer or submicrometer range are bent by forces in the range of intermolecular forces. The cantilever deflection can be detected by optical or electrical methods and converted
to an electrical output. In this work we discuss the sensitivity and resolution of such electromechanical molecular detectors,
and present various examples of existing developments and their application to [bio]molecular analysis.
2013-02-02T20:37:53Z
2013-02-02T20:37:53Z
2005
artÃculo
Contributions to Science, vol 3 (1), pp. 67-78
1575-6343
http://hdl.handle.net/10261/65698
eng
openAccess
Institut d'Estudis Catalans