2024-03-29T13:25:08Zhttp://digital.csic.es/dspace-oai/requestoai:digital.csic.es:10261/2076242022-02-16T13:34:11Zcom_10261_36com_10261_4col_10261_289
2020-04-15T09:48:46Z
urn:hdl:10261/207624
Optical Transduction for Vertical Nanowire Resonators
Molina Fernández, Juan
Ramos Vega, Daniel
Gil-Santos, Eduardo
Escobar, Javier Enrique
Ruz Martínez, José Jaime
Tamayo de Miguel, Francisco Javier
San Paulo, Álvaro
Calleja, Montserrat
European Commission
Ministerio de Ciencia, Innovación y Universidades (España)
Agencia Estatal de Investigación (España)
Comunidad de Madrid
Fundación General CSIC
CSIC - Unidad de Recursos de Información Científica para la Investigación (URICI)
Ramos Vega, Daniel [0000-0003-2677-4058]
San Paulo, Álvaro [0000-0001-9325-8892]
Calleja, Montserrat [0000-0003-2414-5725]
Semiconductor Nanowires
Silicon Nanowires
Nanomechanical Resonators
Nanomechanical Sensors
Nanoelectromechanical Systems (NEMS)
We describe an optical transduction mechanism to measure the flexural mode vibrations of vertically aligned nanowires on a flat substrate with high sensitivity, linearity, and ease of implementation. We demonstrate that the light reflected from the substrate when a laser beam strikes it parallel to the nanowires is modulated proportionally to their vibration, so that measuring such modulation provides a highly efficient resonance readout. This mechanism is applicable to single nanowires or arrays without specific requirements regarding their geometry or array pattern, and no fabrication process besides the nanowire generation is required. We show how to optimize the performance of this mechanism by characterizing the split flexural modes of vertical silicon nanowires in their full dynamic range and up to the fifth mode order. The presented transduction approach is relevant for any application of nanowire resonators, particularly for integrating nanomechanical sensing in functional substrates based on vertical nanowires for biological applications.
2020-04-15T09:48:46Z
2020-04-15T09:48:46Z
2020-03-19
artículo
Nano Letters 20(4): 2359-2369 (2020)
1530-6984
http://hdl.handle.net/10261/207624
10.1021/acs.nanolett.9b04909
1530-6992
http://dx.doi.org/10.13039/501100006003
http://dx.doi.org/10.13039/501100011033
http://dx.doi.org/10.13039/100012818
http://dx.doi.org/10.13039/501100000780
32191041
eng
Publisher's version
https://doi.org/10.1021/acs.nanolett.9b04909
Sí
info:eu-repo/grantAgreement/EC/H2020/681275
info:eu-repo/grantAgreement/AEI/Plan Estatal de Investigación Científica y Técnica y de Innovación 2017-2020/PGC2018-101762-B-100
PGC2018-101762-B-100/AEI/10.13039/501100011033
S2018/NMT-4291/TEC2SPACE-CM
info:eu-repo/grantAgreement/EC/H2020/703354
openAccess
American Chemical Society