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Browsing by Author Benedicto, Marcos

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RightsPreviewIssue DateTitleAuthor(s)Type
openAccess1556-276X-6-400.pdf.jpg31-May-2011Fabrication of HfO2 patterns by laser interference nanolithography and selective dry etching for III-V CMOS applicationBenedicto, Marcos CSIC; Galiana, Beatriz CSIC ORCID; Molina-Aldareguia, Jon; Monaghan, Scott; Hurley, Paul K.; Cherkaoui, Karim; Vázquez, Luis CSIC ORCID ; Tejedor, Paloma CSIC ORCIDartículo
closedAccessaccesoRestringido.pdf.jpg2014First tests of the ion irradiation and implantation beamline at the CMAMJiménez-Rey, D.; Benedicto, Marcos CSIC; Muñoz-Martín, A. CSIC ORCID; Bachiller-Perea, D.; Olivares Pascual, José; Climent-Font, A.; Gómez-Ferrer, B.; Rodríguez, A.; Narros, J.; Maira-Vidal, A. CSIC; Álvarez, J.; Nakbi, A.; Zucchiatti, A.; Aragón, F. de; García, J. M.; Vila, R.artículo
openAccessES2395033B1.pdf.jpg7-Feb-2013Método de nanoestructuración de láminas ultra-finas de un óxido dieléctrico de alta permitividadTejedor, Paloma CSIC ORCID; Benedicto, Marcos CSIC; Galiana, Beatriz CSIC ORCIDpatente
openAccessenergetics and growth kinetics.pdf.jpg2013Modified energetics and growth kinetics on H-terminated GaAs (110)Galiana, Beatriz CSIC ORCID; Benedicto, Marcos CSIC; Díez-Merino, Laura; Lorbek, S.; Hlawacek, G.; Teichert, Christian; Tejedor, Paloma CSIC ORCIDartículo
closedAccessaccesoRestringido.pdf.jpg3-Sep-2014Nucleation kinetics of SrTiO3 3D islands and nanorings on Si substratesTejedor, Paloma CSIC ORCID; Benedicto, Marcos CSIC; Vázquez, Luis CSIC ORCID ; Galiana, Beatriz CSIC ORCIDartículo
openAccessTejedor_Selective_MRS_Advances_2019.pdf.jpg2019Selective area growth of InxGa1-xAs nanowires on HfO2 templates for highly scaled nMOS devicesTejedor, Paloma CSIC ORCID; Benedicto, Marcos CSICartículo
openAccessStep-step interactions on GaAs.pdf.jpg2013Step-step interactions on GaAs (110) nanopatternsGaliana, Beatriz CSIC ORCID; Benedicto, Marcos CSIC; Tejedor, Paloma CSIC ORCIDartículo