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Surface nanostructuring of TiO2 thin films by ion beam irradiation

AuthorsRomero-Gómez, Pablo ; Palmero, Alberto ; Yubero, Francisco ; Vinnichenko, M.; Kolitsch, A.; González-Elipe, Agustín R.
KeywordsSurface structure
Ion beam irradiation
Issue Date2009
PublisherPergamon Press
CitationScripta Materialia 60: 574- 577 (2009)
AbstractThis work reports a procedure to modify the surface nanostructure of TiO2 anatase thin films through ion beam irradiation with energies in the keV range. Irradiation with N+ ions leads to the formation of a layer with voids at a depth similar to the ion-projected range. By setting the ion-projected range a few tens of nanometers below the surface of the film, well-ordered nanorods appear aligned with the angle of incidence of the ion beam. Slightly different results were obtained by using heavier (S+) and lighter (B+) ions under similar conditions. © 2008 Acta Materialia Inc.
Identifiersdoi: 10.1016/j.scriptamat.2008.12.014
issn: 1359-6462
Appears in Collections:(ICMS) Artículos
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