Characterization of edgeless detectors fabricated by dry etching process

Abstract

This work presents results from a new type of edgeless detector, fabricated using an innovative approach to reduce the conventional width of the terminating structure of position sensitive detectors to the detector rim, still using standard planar fabrication technology. A current terminating ring is used to decouple the electrical behaviour of the surface from the sensitive volume within a few tens of micrometres. The detectors, fabricated using a dry etching process to cut the detector as closely as possible to the detector rim, have been illuminated using an infrared laser. The detectors have very high efficiency up to the insensitive area which is located about 25 μm from the detector edge. A detector irradiated with neutrons has also shown good charge collection and lower leakage currents in the current terminating rings compared to non-irradiated ones.