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Open Access item Novel methods to pattern polymers for microfluidics

Authors:Martín, C.
Llobera, Andreu
Leïchlé, T.
Villanueva, G.
Voigt, A.
Fakhfouri, V.
Kim, J.Y.
Berthet, N.
Bausells, J.
Gruetzner, G.
Nicu, L.
Bruegger, Juergen
Pérez Murano, Francesc
Keywords:Liquid spotter, Microfluidics, Hydrophobic barriers, Soft-lithography, Ink-jet
Issue Date:10-Jan-2008
Citation:Microelectronic Engineering 85 (2008) 972-975
Abstract:We present two novel methods for the preparation of arbitrary micro-scale patterns of polymers on surfaces with pre-defined topography. While photosensitive polymers are used commonly together with optical lithography, the methods presented can be used for nonphotostructurable polymers and where spin-coating cannot be performed. As demonstrator of the viability of the proposed fabrication process, they have been applied for the definition of hydrophobic barriers on a microfluidics network, which is dedicated to selectively dispense liquid to a spotting device consisting of 12 silicon microcantilevers.
Publisher version (URL):http://dx.doi.org/10.1016/j.mee.2008.01.052
Appears in Collections:(IMB-CNM) Artículos

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