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Please use this identifier to cite or link to this item: http://hdl.handle.net/10261/7708
Title: Novel methods to pattern polymers for microfluidics
Authors: Martín, C.; Llobera, Andreu; Leïchlé, T.; Villanueva, G.; Voigt, A.; Fakhfouri, V.; Kim, J.Y.; Berthet, N.; Bausells, J.; Gruetzner, G.; Nicu, L.; Bruegger, Juergen; Pérez Murano, Francesc
Keywords: Liquid spotter
Hydrophobic barriers
Issue Date: 10-Jan-2008
Publisher: Elsevier
Citation: Microelectronic Engineering 85 (2008) 972-975
Abstract: We present two novel methods for the preparation of arbitrary micro-scale patterns of polymers on surfaces with pre-defined topography. While photosensitive polymers are used commonly together with optical lithography, the methods presented can be used for nonphotostructurable polymers and where spin-coating cannot be performed. As demonstrator of the viability of the proposed fabrication process, they have been applied for the definition of hydrophobic barriers on a microfluidics network, which is dedicated to selectively dispense liquid to a spotting device consisting of 12 silicon microcantilevers.
Publisher version (URL): http://dx.doi.org/10.1016/j.mee.2008.01.052
URI: http://hdl.handle.net/10261/7708
DOI: 10.1016/j.mee.2008.01.052
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