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Constructing multilayers with absorbing materials

AuthorsLarruquert, Juan Ignacio ; Vidal-Dasilva, M. ; García-Cortés, S.; Fernández Perea, Mónica; Méndez, José Antonio ; Aznárez, José Antonio
Issue Date2010
PublisherOptical Society of America
CitationChinese Optics Letters 8: 159-162 (2010)
AbstractThe strong absorption of materials in the extreme ultraviolet (EUV) above ~50 nm has precluded the development of efficient coatings. The development of novel coatings with improved EUV performance is presented. An extensive research was performed on the search and characterization of materials with moderate absorption, such as various lanthanides. Based on this research, novel multilayers based on Yb, Al, and SiO have been developed with a narrowband performance in the 50-92 nm range. Furthermore, procedures for the design of multi-material multilayers with absorbing materials have been derived, which resulted in multilayers with enhanced reflectance. © 2010 Chinese Optics Letters.
Identifiersdoi: 10.3788/COL20100802.0159
issn: 1671-7694
Appears in Collections:(IFA) Artículos
(CFMAC-IO) Artículos
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