Laser induced breakdown spectroscopy of germane plasma induced by IR CO2 pulsed laser

Abstract

Laser-induced breakdown spectroscopy (LIBS) in germane (GeH4), initially at room temperature and pressures ranging from 2 to 10 kPa, was studied using a highpower transverse excitation atmospheric (TEA) CO2 laser (λ = 10.653 μm, τFWHM = 64 ns and power densities ranging from 0.28 to 5.52 GWcm-2). The strong emission spectrum of the generated plasma is mainly due to electronic relaxation of excited Ge, H and ionic fragments Ge+, Ge2+ and Ge3+. The weak emission is due to molecular bands of H2. Excitation temperatures of 8100 ± 300 K and 23,500 ± 2500 K were estimated by Ge atomic and Ge+ singly ionized lines, respectively. Electron number densities of the order of (0.7-6.2) × 1017 cm-3 were deduced from the Stark broadening of several atomic Ge lines. The characteristics of the spectral emission intensities from different species have been investigated as functions of the germane pressure and laser irradiance. Optical breakdown threshold intensities in germane at 10.653 μm have been determined. The mechanism of initiation of the laser-induced plasma in germane has been analyzed. © Springer-Verlag 2010.