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Título: | Kinetics of laser-induced surface melting and oxide removal in single-crystalline Ge |
Autor: | Solís Céspedes, Javier CSIC ORCID ; Vega, Fidel CSIC ORCID; Afonso, Carmen N. CSIC | Fecha de publicación: | 1996 | Editor: | Springer Nature | Citación: | Applied Physics A: Materials Science and Processing 62: 197- 202 (1996) | Resumen: | The process of oxide removal in crystalline Ge using a pulsed ultraviolet laser has been studied by means of real-time reflectivity measurements with nanosecond resolution. The interaction of laser radiation with a clean, oxide-free surface has been characterized and the inhomogeneous and homogeneous energy density melting thresholds of c-Ge for 193 nm radiation have been determined. The values are 180 and 370 mJ/cm2, respectively. We have demonstrated that it is possible to remove an oxide overlayer by irradiation in vacuum and to produce a surface that shows the same response to laser radiation as a smooth, oxide-free, chemically cleaned surface. Under certain specific irradiation conditions it is even possible, after removing the oxide overlayer, to produce an enhanced crystalline quality in the near-surface region compared to that obtained upon chemical cleaning as evidenced by Rutherford backscattering/channeling measurements. | URI: | http://hdl.handle.net/10261/56730 | DOI: | 10.1007/s003390050285 | Identificadores: | doi: 10.1007/s003390050285 issn: 0947-8396 |
Aparece en las colecciones: | (CFMAC-IO) Artículos |
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