Ultrasmall functional ferromagnetic nanostructures grown by focused electron-beam-induced deposition

Abstract

We have successfully grown ultrasmall cobalt nanostructures (lateral size below 30 nm) by optimization of the growth conditions using focused electron-beam-induced deposition techniques. This direct-write nanolithography technique is thus shown to produce unprecedented resolution in the growth of magnetic nanostructures. The challenging magnetic characterization of such small structures is here carried out by means of electron holography techniques. Apart from growing ultranarrow nanowires, very small Hall sensors have been created and their large response has been unveiled.