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http://hdl.handle.net/10261/43871
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Campo DC | Valor | Lengua/Idioma |
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dc.contributor.author | Valledor, Luis | - |
dc.contributor.author | Pisonero, J. | - |
dc.contributor.author | Bordel, N. | - |
dc.contributor.author | Martín, José Ignacio | - |
dc.contributor.author | Quirós, Carlos | - |
dc.contributor.author | Tempez, A. | - |
dc.contributor.author | Sanz-Medel, A. | - |
dc.date.accessioned | 2012-01-02T11:18:53Z | - |
dc.date.available | 2012-01-02T11:18:53Z | - |
dc.date.issued | 2010 | - |
dc.identifier.citation | Analytical and Bioanalytical Chemistry 396(8): 2881-2887 (2010) | es_ES |
dc.identifier.issn | 1618-2642 | - |
dc.identifier.uri | http://hdl.handle.net/10261/43871 | - |
dc.description | 7 páginas, 3 figuras, 2 tablas. | es_ES |
dc.description.abstract | Nanometer depth resolution is investigated using an innovative pulsed-radiofrequency glow discharge time-of-flight mass spectrometer (pulsed-rf-GD-TOFMS). A series of ultra-thin (in nanometers approximately) Al/Nb bilayers, deposited on Si wafers by dc-magnetron sputtering, is analyzed. An Al layer is first deposited on the Si substrate with controlled and different values of the layer thickness, t Al. Samples with t Al = 50, 20, 5, 2, and 1 nm have been prepared. Then, a Nb layer is deposited on top of the Al one, with a thickness t Nb = 50 nm that is kept constant along the whole series. Qualitative depth profiles of those layered sandwich-type samples are determined using our pulsed-rf-GD-TOFMS set-up, which demonstrated to be able to detect and measure ultra-thin layers (even of 1 nm). Moreover, Gaussian fitting of the internal Al layer depth profile is used here to obtain a calibration curve, allowing thickness estimation of such nanometer layers. In addition, the useful yield (estimation of the number of detected ions per sputtered atom) of the employed pulsed-rf-GD-TOFMS system is evaluated for Al at the selected operating conditions, which are optimized for the in-depth profile analysis with high depth resolution. | es_ES |
dc.description.sponsorship | This work is supported by the European Union 6th framework program within the EMDPA project (contract No 032202 (NMP3-CT-2006-032202)) and by Spanish Ministry of Science (grant No MAT2007-65097-C02 and FIS2008-06249). R. Valledor acknowledges financial support from FPU Ph.D. Grant from Ministry of Education of Spain. Additionally, J. Pisonero and C. Quiros acknowledge financial support from “Ramon y Cajal” Research Program of the Ministry of Education of Spain, cofinanced by the European Social Fund. | es_ES |
dc.language.iso | eng | es_ES |
dc.publisher | Springer Nature | es_ES |
dc.rights | closedAccess | es_ES |
dc.subject | Glow discharge | es_ES |
dc.subject | Mass spectrometry | es_ES |
dc.subject | Depth profile analysis | es_ES |
dc.subject | Nanometer layers | es_ES |
dc.subject | Useful yield | es_ES |
dc.title | Direct chemical in-depth profile analysis and thickness quantification of nanometer multilayers using pulsed-rf-GD-TOFMS | es_ES |
dc.type | artículo | es_ES |
dc.identifier.doi | 10.1007/s00216-009-3382-8 | - |
dc.description.peerreviewed | Peer reviewed | es_ES |
dc.relation.publisherversion | http://dx.doi.org/10.1007/s00216-009-3382-8 | es_ES |
dc.identifier.e-issn | 1618-2650 | - |
dc.contributor.funder | European Commission | - |
dc.contributor.funder | Ministerio de Ciencia e Innovación (España) | - |
dc.contributor.funder | Ministerio de Educación (España) | - |
dc.contributor.funder | Consejo Superior de Investigaciones Científicas (España) | - |
dc.identifier.funder | http://dx.doi.org/10.13039/501100000780 | es_ES |
dc.identifier.funder | http://dx.doi.org/10.13039/501100004837 | es_ES |
dc.identifier.funder | http://dx.doi.org/10.13039/501100003339 | es_ES |
dc.type.coar | http://purl.org/coar/resource_type/c_6501 | es_ES |
item.openairetype | artículo | - |
item.grantfulltext | none | - |
item.cerifentitytype | Publications | - |
item.openairecristype | http://purl.org/coar/resource_type/c_18cf | - |
item.fulltext | No Fulltext | - |
item.languageiso639-1 | en | - |
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